Feasibility Demonstration of a Massively Parallelizable Optical Near-Field Sensor for Sub-Wavelength Defect Detection and Imaging

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Description

To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection

To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection because the scattered signals from a multiplicity of such elements would end up interfering with each other. However, an alternative massively parallelized configuration, capable of interrogating multiple adjacent areas of the surface at the same time, was proposed in 2002. Full physics simulations of the photonic antenna detector element that enables this instrument, show that using conventional red laser light (in the 600 nm range) the detector magnifies the signal from an 8 nm particle by up to 1.5 orders of magnitude. The antenna is a shaped slot element in a 60 nm silver film. The ability of this detector element to resolve λ/78 objects is confirmed experimentally at radio frequencies by fabricating an artificial material structure that mimics the optical permittivity of silver scaled to 2 GHz, and “cutting” into it the slot antenna. The experimental set-up is also used to demonstrate the imaging of a patterned surface in which the critical dimensions of the pattern are λ/22 in size.

Date Created
2016-05-17
Agent

Feasibility demonstration of a massively parallelizable near-field sensor for sub-wavelength defect detection and imaging

154298-Thumbnail Image.png
Description
To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection

To detect and resolve sub-wavelength features at optical frequencies, beyond the diffraction limit, requires sensors that interact with the electromagnetic near-field of those features. Most instruments operating in this modality scan a single detector element across the surface under inspection because the scattered signals from a multiplicity of such elements would end up interfering with each other. However, an alternative massively parallelized configuration, consisting of a remotely interrogating array of dipoles, capable of interrogating multiple adjacent areas of the surface at the same time, was proposed in 2002.

In the present work a remotely interrogating slot antenna inside a 60nm silver slab is designed which increases the signal to noise ratio of the original system. The antenna is tuned to resonance at 600nm range by taking advantage of the plasmon resonance properties of the metal’s negative permittivity and judicious shaping of the slot element. Full-physics simulations show the capability of detecting an 8nm particle using red light illumination. The sensitivity to the λ/78 particle is attained by detecting the change induced on the antenna’s far field signature by the proximate particle, a change that is 15dB greater than the scattering signature of the particle by itself.

To verify the capabilities of this technology in a readily accessible experimental environment, a radiofrequency scale model is designed using a meta-material to mimic the optical properties of silver in the 2GHz to 5GHz range. Various approaches to the replication of the metal’s behavior are explored in a trade-off between fidelity to the metal’s natural plasmon response, desired bandwidth of the demonstration, and

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manufacturability of the meta-material. The simulation and experimental results successfully verify the capability of the proposed near-field sensor in sub-wavelength detection and imaging not only as a proof of concept for optical frequencies but also as a potential imaging device for radio frequencies.
Date Created
2016
Agent