Test cost has become a significant portion of device cost and a bottleneck in high volume manufacturing. Increasing integration density and shrinking feature sizes increased test time/cost and reduce observability. Test engineers have to put a tremendous effort in order to maintain test cost within an acceptable budget. Unfortunately, there is not a single straightforward solution to the problem. Products that are tested have several application domains and distinct customer profiles. Some products are required to operate for long periods of time while others are required to be low cost and optimized for low cost. Multitude of constraints and goals make it impossible to find a single solution that work for all cases. Hence, test development/optimization is typically design/circuit dependent and even process specific. Therefore, test optimization cannot be performed using a single test approach, but necessitates a diversity of approaches. This works aims at addressing test cost minimization and test quality improvement at various levels. In the first chapter of the work, we investigate pre-silicon strategies, such as design for test and pre-silicon statistical simulation optimization. In the second chapter, we investigate efficient post-silicon test strategies, such as adaptive test, adaptive multi-site test, outlier analysis, and process shift detection/tracking.

Micro-Electro Mechanical System (MEMS) is the micro-scale technology applying on various fields. Traditional testing strategy of MEMS requires physical stimulus, which leads to high cost specified equipment. Also there are a large number of wafer-level measurements for MEMS. A method of estimation calibration coefficient only by electrical stimulus based wafer level measurements is included in the thesis. Moreover, a statistical technique is introduced that can reduce the number of wafer level measurements, meanwhile obtaining an accurate estimate of unmeasured parameters. To improve estimation accuracy, outlier analysis is the effective technique and merged in the test flow. Besides, an algorithm for optimizing test set is included, also providing numerical estimated prediction error.

ABSTRACT As the technology length shrinks down, achieving higher gain is becoming very difficult in deep sub-micron technologies. As the supply voltages drop, cascodes are very difficult to implement and cascade amplifiers are needed to achieve sufficient gain with required output swing. This sets the fundamental limit on the SNR and hence the maximum resolution that can be achieved by ADC. With the RSD algorithm and the range overlap, the sub ADC can tolerate large comparator offsets leaving the linearity and accuracy requirement for the DAC and residue gain stage. Typically, the multiplying DAC requires high gain wide bandwidth op-amp and the design of this high gain op-amp becomes challenging in the deep submicron technologies. This work presents `A 12 bit 25MSPS 1.2V pipelined ADC using split CLS technique' in IBM 130nm 8HP process using only CMOS devices for the application of Large Hadron Collider (LHC). CLS technique relaxes the gain requirement of op-amp and improves the signal-to-noise ratio without increase in power or input sampling capacitor with rail-to-rail swing. An op-amp sharing technique has been incorporated with split CLS technique which decreases the number of op-amps and hence the power further. Entire pipelined converter has been implemented as six 2.5 bit RSD stages and hence decreases the latency associated with the pipelined architecture - one of the main requirements for LHC along with the power requirement. Two different OTAs have been designed to use in the split-CLS technique. Bootstrap switches and pass gate switches are used in the circuit along with a low power dynamic kick-back compensated comparator.

Due to heterogeneity at the cellular level, single cell analysis (SCA) has become a necessity to study cellomics for the early detection of diseases like cancer. Development of single cell manipulation systems is very critical for performing SCA. In this thesis, electrorotation (ROT) chips to trap and rotate single cells using electrokinetic forces have been developed. The ROT chip mainly consists of a set of closely spaced metal electrodes (60µm interspacing between opposite electrodes) that forms a closed electric field cage (electrocage) when driven with high frequency AC voltages. Cells were flowed through a microchannel to the electrocage where they could be precisely trapped, levitated and rotated in 3-D along the axis of interest. The dielectrophoresis based ROT chip design and relevant electrokinetic effects have been simulated using COMSOL 3.4 to optimize the design parameters. Also, various semiconductor technology fabrication process steps have been developed and optimized for better yield and repeatability in the manufacture of the ROT chip. The ROT chip thus fabricated was used to characterize rotation of single cells with respect to the control parameters namely excitation voltage, frequency and cell line. The longevity of cell rotation under electric fields has been probed. Also, the Joule heating inside the ROT chip due to applied voltage has been characterized to know the thermal stress on the cells. The major advantages of the ROT chip developed are precise electrorotation of cells, simple design and straight forward fabrication process.

The front end of almost all ADCs consists of a Sample and Hold Circuit in order to make sure a constant analog value is digitized at the end of ADC. The design of Track and Hold Circuit (THA) mainly focuses on following parameters: Input frequency, Sampling frequency, dynamic Range, hold pedestal, feed through error. This thesis will discuss the importance of these parameters of a THA to the ADCs and commonly used architectures of THA. A new architecture with SiGe HBT transistors in BiCMOS 130 nm technology is presented here. The proposed topology without complicated circuitry achieves high Spurious Free Dynamic Range(SFDR) and Total Harmonic Distortion (THD).These are important figure of merits for any THA which gives a measure of non-linearity of the circuit. The proposed topology is implemented in IBM8HP 130 nm BiCMOS process combines typical emitter follower switch in bipolar THAs and output steering technique proposed in the previous work. With these techniques and the cascode transistor in the input which is used to isolate the switch from the input during the hold mode, better results have been achieved. The THA is designed to work with maximum input frequency of 250 MHz at sampling frequency of 500 MHz with input currents not more than 5mA achieving an SFDR of 78.49 dB. Simulation and results are presented, illustrating the advantages and trade-offs of the proposed topology.

The past two decades have been monumental in the advancement of microchips designed for a diverse range of medical applications and bio-analysis. Owing to the remarkable progress in micro-fabrication technology, complex chemical and electro-mechanical features can now be integrated into chip-scale devices for use in biosensing and physiological measurements. Some of these devices have made enormous contributions in the study of complex biochemical processes occurring at the molecular and cellular levels while others overcame the challenges of replicating various functions of human organs as implant systems. This thesis presents test data and analysis of two such systems. First, an ISFET based pH sensor is characterized for its performance in a continuous pH monitoring application. Many of the basic properties of ISFETs including I-V characteristics, pH sensitivity and more importantly, its long term drift behavior have been investigated. A new theory based on frequent switching of electric field across the gate oxide to decrease the rate of current drift has been successfully implemented with the help of an automated data acquisition and switching system. The system was further tested for a range of duty cycles in order to accurately determine the minimum length of time required to fully reset the drift. Second, a microfluidic based vestibular implant system was tested for its underlying characteristics as a light sensor. A computer controlled tilt platform was then implemented to further test its sensitivity to inclinations and thus it‟s more important role as a tilt sensor. The sensor operates through means of optoelectronics and relies on the signals generated from photodiode arrays as a result of light being incident on them. ISFET results show a significant drop in the overall drift and good linear characteristics. The drift was seen to reset at less than an hour. The photodiodes show ideal I-V comparison between photoconductive and photovoltaic modes of operation with maximum responsivity at 400nm and a shunt resistance of 394 MΩ. Additionally, post-processing of the tilt sensor to incorporate the sensing fluids is outlined. Based on several test and fabrication results, a possible method of sealing the open cavity of the chip using a UV curable epoxy has been discussed.

The first part describes Metal Semiconductor Field Effect Transistor (MESFET) based fundamental analog building blocks designed and fabricated in a single poly, 3-layer metal digital CMOS technology utilizing fully depletion mode MESFET devices. DC characteristics were measured by varying the power supply from 2.5V to 5.5V. The measured DC transfer curves of amplifiers show good agreement with the simulated ones with extracted models from the same process. The accuracy of the current mirror showing inverse operation is within ±15% for the current from 0 to 1.5mA with the power supply from 2.5 to 5.5V. The second part presents a low-power image recognition system with a novel MESFET device fabricated on a CMOS substrate. An analog image recognition system with power consumption of 2.4mW/cell and a response time of 6µs is designed, fabricated and characterized. The experimental results verified the accuracy of the extracted SPICE model of SOS MESFETs. The response times of 4µs and 6µs for one by four and one by eight arrays, respectively, are achieved with the line recognition. Each core cell for both arrays consumes only 2.4mW. The last part presents a CMOS low-power transceiver in MICS band is presented. The LNA core has an integrated mixer in a folded configuration. The baseband strip consists of a pseudo differential MOS-C band-pass filter achieving demodulation of 150kHz-offset BFSK signals. The SRO is used in a wakeup RX for the wake-up signal reception. The all digital frequency-locked loop drives a class AB power amplifier in a transmitter. The sensitivity of -85dBm in the wakeup RX is achieved with the power consumption of 320µW and 400µW at the data rates of 100kb/s and 200kb/s from 1.8V, respectively. The sensitivities of -70dBm and -98dBm in the data-link RX are achieved with NF of 40dB and 11dB at the data rate of 100kb/s while consuming only 600µW and 1.5mW at 1.2V and 1.8V, respectively.

Obtaining local electrochemical (EC) information is extremely important for understanding basic surface reactions, and for many applications. Scanning electrochemical microscopy (SECM) can obtain local EC information by scanning a microelectrode across the surface. Although powerful, SECM is slow, the scanning microelectrode may perturb reaction and the measured signal decreases with the size of microelectrode. This thesis demonstrates a new imaging technique based on a principle that is completely different from the conventional EC detection technologies. The technique, referred to as plasmonic-based electrochemical imaging (PECI), images local EC current (both faradaic and non-faradaic) without using a scanning microelectrode. Because PECI response is an optical signal originated from surface plasmon resonance (SPR), PECI is fast and non-invasive and its signal is proportional to incident light intensity, thus does not decrease with the area of interest. A complete theory is developed in this thesis work to describe the relationship between EC current and PECI signal. EC current imaging at various fixed potentials and local cyclic voltammetry methods are developed and demonstrated with real samples. Fast imaging rate (up to 100,000 frames per second) with 0.2×3µm spatial resolution and 0.3 pA detection limit have been achieved. Several PECI applications have been developed to demonstrate the unique strengths of the new imaging technology. For example, trace particles in fingerprint is detected by PECI, a capability that cannot be achieved with the conventional EC technologies. Another example is PECI imaging of EC reaction and interfacial impedance of graphene of different thicknesses. In addition, local square wave voltammetry capability is demonstrated and applied to study local catalytic current of platinum nanoparticle microarray. This thesis also describes a related but different research project that develops a new method to measure surface charge densities of SPR sensor chips, and micro- and nano-particles. A third project of this thesis is to develop a method to expand the conventional SPR detection and imaging technology by including a waveguide mode. This innovation creates a sensitive detection of bulk index of refraction, which overcomes the limitation that the conventional SPR can probe only changes near the sensor surface within ~200 nm.

Different environmental factors, such as ultraviolet radiation (UV), relative humidity (RH) and the presence of reducing gases (acetone and ethanol), play an important role in the daily life of human beings. UV is very important in a number of areas, such as astronomy, resin curing of polymeric materials, combustion engineering, water purification, flame detection and biological effects with more recent proposals like early missile plume detection, secure space-to-space communications and pollution monitoring. RH is a very common parameter in the environment. It is essential not only for human comfort, but also for a broad spectrum of industries and technologies. There is a substantial interest in the development of RH sensors for applications in monitoring moisture level at home, in clean rooms, cryogenic processes, medical and food science, and so on. The concentration of acetone and other ketone bodies in the exhaled air can serve as an express noninvasive diagnosis of ketosis. Meanwhile, driving under the influence of alcohol is a serious traffic violation and this kind of deviant behavior causes many accidents and deaths on the highway. Therefore, the detection of ethanol in breath is usually used as a quick and reliable screening method for the sobriety checkpoint. Traditionally, semiconductor metal oxide sensors are the major candidates employed in the sensing applications mentioned above. However, they suffer from the low sensitivity, poor selectivity and huge power consumption. In this dissertation, Zinc Oxide (ZnO) based Film Bulk Acoustic Resonator (FBAR) was developed to monitor UV, RH, acetone and ethanol in the environment. FBAR generally consists of a sputtered piezoelectric thin film (ZnO/AlN) sandwiched between two electrodes. It has been well developed both as filters and as high sensitivity mass sensors in recent years. FBAR offers high sensitivity and excellent selectivity for various environment monitoring applications. As the sensing signal is in the frequency domain, FABR has the potential to be incorporated in a wireless sensor network for remote sensing. This study extended our current knowledge of FBAR and pointed out feasible directions for future exploration.