In the past decades, single-cell metabolic analysis has been playing a key role in understanding cellular heterogeneity, disease initiation, progression, and drug resistance. Therefore, it is critical to develop technologies for individual cellular metabolic analysis using various configurations of microfluidic devices. Compared to bulk-cell analysis which is widely used by reporting an averaged measurement, single-cell analysis is able to present the individual cellular responses to the external stimuli. Particularly, oxygen consumption rate (OCR) and extracellular acidification rate (ECAR) are two key parameters to monitor heterogeneous metabolic profiles of cancer cells. To achieve multi-parameter metabolic measurements on single cells, several technical challenges need to be overcome: (1) low adhesion of soft materials micro-fabricated on glass surface for multiple-sensor deposition and single-cell immobilization, e.g. SU-8, KMPR, etc.; (2) high risk of using external mechanical forces to create hermetic seals between two rigid fused silica parts, even with compliance layers; (3) how to accomplish high-throughput for single-cell trapping, metabolic profiling and drug screening; (4) high process cost of micromachining on glass substrate and incapability of mass production.

In this dissertation, the development of microfabrication technologies is demonstrated to design reliable configurations for analyzing multiple metabolic parameters from single cells, including (1) improved KMPR/SU-8 microfabrication protocols for fabricating microwell arrays that can be integrated and sealed to 3 × 3 tri-color sensor arrays for OCR and ECAR measurements; (2) design and characterization of a microfluidic device enabling rapid single-cell trapping and hermetic sealing single cells and tri-color sensors within 10 × 10 hermetically sealed microchamber arrays; (3) exhibition of a low-cost microfluidic device based on plastics for single-cell metabolic multi-parameter profiling. Implementation of these improved microfabrication methods should address the aforementioned challenges and provide a high throughput and multi-parameter single cell metabolic analysis platform.

Within the last decade there has been remarkable interest in single-cell metabolic analysis as a key technology for understanding cellular heterogeneity, disease initiation, progression, and drug resistance. Technologies have been developed for oxygen consumption rate (OCR) measurements using various configurations of microfluidic devices. The technical challenges of current approaches include: (1) deposition of multiple sensors for multi-parameter metabolic measurements, e.g. oxygen, pH, etc.; (2) tedious and labor-intensive microwell array fabrication processes; (3) low yield of hermetic sealing between two rigid fused silica parts, even with a compliance layer of PDMS or Parylene-C. In this thesis, several improved microfabrication technologies are developed and demonstrated for analyzing multiple metabolic parameters from single cells, including (1) a modified "lid-on-top" configuration with a multiple sensor trapping (MST) lid which spatially confines multiple sensors to micro-pockets enclosed by lips for hermetic sealing of wells; (2) a multiple step photo-polymerization method for patterning three optical sensors (oxygen, pH and reference) on fused silica and on a polyethylene terephthalate (PET) surface; (3) a photo-polymerization method for patterning tri-color (oxygen, pH and reference) optical sensors on both fused silica and on the PET surface; (4) improved KMPR/SU-8 microfabrication protocols for fabricating microwell arrays that can withstand cell culture conditions. Implementation of these improved microfabrication methods should address the aforementioned challenges and provide a high throughput and multi-parameter single cell metabolic analysis platform.