Emulation of Plasma Load by Saturation Control of Low Permeability Inductors
Description
Power amplifiers and tuneable matching networks for plasma generation systems arebeing continuously advanced, and recent innovations have shown tremendous
improvements in their size, efficiency, and capability. These improvements must
ultimately be validated on a live plasma chamber, but this is costly and time-consuming,
and debugging errors or failures is a challenge owing to the highly dynamic nature of
the plasma and the experimental prototype nature of the advancements. This work
addresses this challenge by developing a reactive load emulation system that can mimic
the inductive reactance of a live plasma chamber. This includes a study of the saturation
characteristics of low-permeability, high-frequency materials, demonstration of the
suitability of this method for plasma emulation, and the design of an inductor array
platform which verifies the approach.
Date Created
The date the item was original created (prior to any relationship with the ASU Digital Repositories.)
2024
Agent
- Author (aut): Tagare, Darshan Ravindra
- Thesis advisor (ths): Ranjram, Mike
- Committee member: Mallik, Ayan
- Committee member: Ayyanar, Raja
- Publisher (pbl): Arizona State University