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Details
Title
- Real-Time Composition Control of InAlAs Grown on InP Using Spectroscopic Ellipsometry
Contributors
- Beaudoin, M. (Author)
- Grassi, E. (Author)
- Johnson, Shane R. (Author)
- Ramaswamy, K. (Author)
- Tsakalis, K. (Author)
- Alford, T. L. (Author)
- Zhang, Yong-Hang (Author)
Date Created
The date the item was original created (prior to any relationship with the ASU Digital Repositories.)
2000
Resource Type
Collections this item is in
Identifier
- Digital object identifier: 10.1116/1.591398
Note
- Copyright 2000 American Vacuum Society. Link to the original site http://scitation.aip.org/content/avs/journal/jvstb/18/3/10.1116/1.591398
Citation and reuse
Cite this item
This is a suggested citation. Consult the appropriate style guide for specific citation guidelines.
M. Beaudoin, E. Grassi, S. R. Johnson, K. Ramaswamy, K. Tsakalis, T. L. Alford, and Y.-H. Zhang, Journal of Vacuum Science & Technology B 18, 1435 (2000)