Full metadata
Title
Real Time in Situ Composition Control of InGaAs Lattice Matched to InP by an 88-Wavelength Ellipsometer
Date Created
1998
Contributors
- Kuo, C.-H. (Author)
- Boonzaayer, Martin D. (Author)
- DeHerrera, M. (Author)
- Kyong, T. (Author)
- Zhang, Yong-Hang (Author)
- Johs, B. (Author)
- Hale, J. S. (Author)
Resource Type
Copyright Statement
In Copyright
Primary Member of
Identifier
Digital object identifier: 10.1116/1.589971
Peer-reviewed
No
Open Access
No
Series
Journal of Vacuum Science & Technology B
Handle
https://hdl.handle.net/2286/R.I.27893
Preferred Citation
C.-H. Kuo, M. Boonzaayer, M. DeHerrera, T. Kyong, Y.-H. Zhang, B. Johs, and J. S. Hale, Journal of Vacuum Science & Technology B 16, 1484 (1998)
Level of coding
minimal
Cataloging Standards
Note
Copyright 1998 American Vacuum Society. Link to the original site http://scitation.aip.org/content/avs/journal/jvstb/16/3/10.1116/1.589971
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